公开(公告)号：US20240355903A1

公开(公告)日：2024-10-24

申请号：US18763777

申请日：2024-07-03

Applicant: Intel Corporation

Inventor： Biswajeet GUHA ,  Dax M. CRUM ,  Stephen M. CEA ,  Leonard P. GULER ,  Tahir GHANI

IPC: H01L29/66 ,  H01L21/28 ,  H01L21/762 ,  H01L21/8234 ,  H01L21/84 ,  H01L27/12 ,  H01L29/06 ,  H01L29/423 ,  H01L29/78 ,  H01L29/786

CPC classification number: H01L29/6653 ,  H01L21/28114 ,  H01L21/28123 ,  H01L21/76224 ,  H01L21/823437 ,  H01L21/823481 ,  H01L21/845 ,  H01L27/1211 ,  H01L29/4238 ,  H01L29/66545 ,  H01L29/66772 ,  H01L29/66795 ,  H01L29/78654 ,  H01L29/78696 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/7853

Abstract: Self-aligned gate endcap (SAGE) architectures with gate-all-around devices above insulator substrates, and methods of fabricating self-aligned gate endcap (SAGE) architectures with gate-all-around devices above insulator substrates, are described. In an example, an integrated circuit structure includes includes a semiconductor nanowire above an insulator substrate and having a length in a first direction. A gate structure is around the semiconductor nanowire, the gate structure having a first end opposite a second end in a second direction, orthogonal to the first direction. A pair of gate endcap isolation structures is included. The first of the pair of gate endcap isolation structures is directly adjacent to the first end of the gate structure, and the second of the pair of gate endcap isolation structures is directly adjacent to the second end of the gate structure.

公开(公告)号：US20240276698A1

公开(公告)日：2024-08-15

申请号：US18633037

申请日：2024-04-11

Applicant: Intel Corporation

Inventor： Tahir GHANI ,  Byron HO ,  Curtis W. WARD ,  Michael L. HATTENDORF ,  Christopher P. AUTH

IPC: H10B10/00 ,  H01L27/06 ,  H01L27/092 ,  H01L29/66

CPC classification number: H10B10/15 ,  H01L27/0688 ,  H01L27/0924 ,  H01L29/66545 ,  H10B10/125

Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. A first isolation structure separates a first end of a first portion of the fin from a first end of a second portion of the fin, the first end of the first portion of the fin having a depth. A gate structure is over the top of and laterally adjacent to the sidewalls of a region of the first portion of the fin. A second isolation structure is over a second end of a first portion of the fin, the second end of the first portion of the fin having a depth different than the depth of the first end of the first portion of the fin.

公开(公告)号：US20240224536A1

公开(公告)日：2024-07-04

申请号：US18090807

申请日：2022-12-29

Applicant: Intel Corporation

Inventor： Abhishek Anil SHARMA ,  Tahir GHANI ,  Jack T. KAVALIEROS ,  Anand S. MURTHY ,  Wilfred GOMES

IPC: H10B51/30

CPC classification number: H10B51/30

Abstract: Structures having layer select transistors for shared peripherals in memory are described. In an example, an integrated circuit structure includes a memory structure layer including a capacitor array coupled to a plurality of plate lines. A memory transistor layer is beneath the memory structure layer, the memory transistor layer including front end transistors coupled to corresponding capacitors of the capacitor array of the memory structure layer. A select transistor layer is over the memory structure layer, the select transistor layer including backend transistors having a channel composition different than the front end transistors. One or more of the backend transistors is coupled to one or more of the plurality of plate lines of the memory structure layer.

公开(公告)号：US20240222520A1

公开(公告)日：2024-07-04

申请号：US18090822

申请日：2022-12-29

Applicant: Intel Corporation

Inventor： Abhishek Anil SHARMA ,  Sagar SUTHRAM ,  Wilfred GOMES ,  Tahir GHANI ,  Anand S. MURTHY ,  Pushkar RANADE

IPC: H01L29/786 ,  H01L23/48 ,  H01L27/088 ,  H01L29/06 ,  H10B41/10 ,  H10B41/27 ,  H10B43/10 ,  H10B43/27

CPC classification number: H01L29/78696 ,  H01L23/481 ,  H01L27/0886 ,  H01L29/0673 ,  H10B41/10 ,  H10B41/27 ,  H10B43/10 ,  H10B43/27

Abstract: Structures having vertical shared gate high-drive thin film transistors are described. In an example, an integrated circuit structure includes a stack of alternating dielectric layers and metal layers. A trench is through the stack of alternating dielectric layers and metal layers. A semiconductor channel layer is along sides of the trench. A gate dielectric layer is along sides the semiconductor channel layer in the trench. A gate electrode is within sides of the gate dielectric layer.

公开(公告)号：US20240222271A1

公开(公告)日：2024-07-04

申请号：US18090828

申请日：2022-12-29

Applicant: Intel Corporation

Inventor： Abhishek Anil SHARMA ,  Pushkar RANADE ,  Wilfred GOMES ,  Tahir GHANI ,  Anand S. MURTHY ,  Sagar SUTHRAM

IPC: H01L23/528 ,  H01L27/092 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775

CPC classification number: H01L23/528 ,  H01L27/0922 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/775

Abstract: Structures having routing across layers of channel structures are described. In an example, an integrated circuit structure includes a first stack of horizontal nanowires along a vertical direction. A second stack of horizontal nanowires is along the vertical direction, the second stack of horizontal nanowires beneath the first stack of horizontal nanowires. A conductive routing layer extends laterally between the first stack of horizontal nanowires and the second stack of horizontal nanowires.

公开(公告)号：US20240145471A1

公开(公告)日：2024-05-02

申请号：US18408223

申请日：2024-01-09

Applicant: Intel Corporation

Inventor： Biswajeet GUHA ,  William HSU ,  Chung-Hsun LIN ,  Kinyip PHOA ,  Oleg GOLONZKA ,  Tahir GHANI ,  Kalyan KOLLURU ,  Nathan JACK ,  Nicholas THOMSON ,  Ayan KAR ,  Benjamin ORR

IPC: H01L27/088 ,  H01L29/06 ,  H01L29/78

CPC classification number: H01L27/0886 ,  H01L29/0653 ,  H01L29/0673 ,  H01L29/785

Abstract: Gate-all-around structures having devices with source/drain-to-substrate electrical contact are described. An integrated circuit structure includes a first vertical arrangement of horizontal nanowires above a first fin. A first gate stack is over the first vertical arrangement of horizontal nanowires. A first pair of epitaxial source or drain structures is at first and second ends of the first vertical arrangement of horizontal nanowires. One or both of the first pair of epitaxial source or drain structures is directly electrically coupled to the first fin. A second vertical arrangement of horizontal nanowires is above a second fin. A second gate stack is over the second vertical arrangement of horizontal nanowires. A second pair of epitaxial source or drain structures is at first and second ends of the second vertical arrangement of horizontal nanowires. Both of the second pair of epitaxial source or drain structures is electrically isolated from the second fin.

公开(公告)号：US20240113111A1

公开(公告)日：2024-04-04

申请号：US17956779

申请日：2022-09-29

Applicant: Intel Corporation

Inventor： Leonard P. GULER ,  Clifford ONG ,  Sukru YEMENICIOGLU ,  Tahir GHANI

IPC: H01L27/088 ,  H01L29/06 ,  H01L29/08 ,  H01L29/786

CPC classification number: H01L27/0886 ,  H01L29/0673 ,  H01L29/0847 ,  H01L29/78696

Abstract: Integrated circuit structures having fin isolation regions recessed for gate contact are described. In an example, an integrated circuit structure includes a vertical stack of horizontal nanowires over a first sub-fin. A gate structure is over the vertical stack of horizontal nanowires and on the first sub-fin. A dielectric structure is laterally spaced apart from the gate structure. The dielectric structure is not over a channel structure but is on a second sub-fin. A dielectric gate cut plug is between the gate structure and the dielectric structure. A recess is in the dielectric structure and in the dielectric gate cut plug. A conductive structure is in the recess, the conductive structure in lateral contact with a gate electrode of the gate structure.

公开(公告)号：US20240113017A1

公开(公告)日：2024-04-04

申请号：US17958288

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Leonard P. GULER ,  Gurpreet SINGH ,  Charles H. WALLACE ,  Tahir GHANI

IPC: H01L23/528 ,  H01L21/768

CPC classification number: H01L23/528 ,  H01L21/76892 ,  H01L21/76837 ,  H01L23/5226

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for forming a plug within a metal layer of a semiconductor device, where the plug is formed within a cavity that is created through the metal layer. The plug may extend through the metal layer and into a layer below the metal layer, which may be a layer that includes a dielectric and one or more electrical routing features. The plug may include an electrical insulator material. The cavity may be formed by placing a mask above the metal layer and performing an etch through the metal layer subsequently filled with a dielectric, where the plug will be tapered and wider at the top of the plug and become narrower as the plug continues through the metal layer and reaches the layer below the metal layer. Other embodiments may be described and/or claimed.

公开(公告)号：US20240105716A1

公开(公告)日：2024-03-28

申请号：US17954206

申请日：2022-09-27

Applicant: Intel Corporation

Inventor： Leonard P. GULER ,  Sukru YEMENICIOGLU ,  Mohit K. HARAN ,  Stephen M. CEA ,  Charles H. WALLACE ,  Tahir GHANI ,  Shengsi LIU ,  Saurabh ACHARYA ,  Thomas O'BRIEN ,  Nidhi KHANDELWAL ,  Marie T. CONTE ,  Prabhjot LUTHRA

IPC: H01L27/088 ,  H01L21/8234

CPC classification number: H01L27/088 ,  H01L21/823475 ,  H01L21/823481

Abstract: Integrated circuit structures having uniform grid metal gate and trench contact cut, and methods of fabricating integrated circuit structures having uniform grid metal gate and trench contact cut, are described. For example, an integrated circuit structure includes a vertical stack of horizontal nanowires. A gate electrode is over the vertical stack of horizontal nanowires. A conductive trench contact is adjacent to the gate electrode. A dielectric sidewall spacer is between the gate electrode and the conductive trench contact. A first dielectric cut plug structure extends through the gate electrode, through the dielectric sidewall spacer, and through the conductive trench contact. A second dielectric cut plug structure extends through the gate electrode, through the dielectric sidewall spacer, and through the conductive trench contact, the second dielectric cut plug structure laterally spaced apart from and parallel with the first dielectric cut plug structure.

公开(公告)号：US20240049450A1

公开(公告)日：2024-02-08

申请号：US18381119

申请日：2023-10-17

Applicant: Intel Corporation

Inventor： Travis W. LAJOIE ,  Abhishek A. SHARMA ,  Van H. LE ,  Chieh-Jen KU ,  Pei-Hua WANG ,  Jack T. KAVALIEROS ,  Bernhard SELL ,  Tahir GHANI ,  Gregory GEORGE ,  Akash GARG ,  Allen B. GARDINER ,  Shem OGADHOH ,  Juan G. ALZATE VINASCO ,  Umut ARSLAN ,  Fatih HAMZAOGLU ,  Nikhil MEHTA ,  Jared STOEGER ,  Yu-Wen HUANG ,  Shu ZHOU

IPC: H10B12/00 ,  H01L27/12

CPC classification number: H10B12/315 ,  H01L27/1218 ,  H01L27/1222 ,  H01L27/1225 ,  H01L28/82 ,  H01L27/1248 ,  H01L27/1255 ,  H01L28/55 ,  H01L28/65 ,  H01L27/124 ,  H10B12/312 ,  H10B12/0335

Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate. A first capacitor includes a first top plate and a first bottom plate above the substrate. The first top plate is coupled to a first metal electrode within an inter-level dielectric (ILD) layer to access the first capacitor. A second capacitor includes a second top plate and a second bottom plate, where the second top plate is coupled to a second metal electrode within the ILD layer to access the second capacitor. The second metal electrode is disjoint from the first metal electrode. The first capacitor is accessed through the first metal electrode without accessing the second capacitor through the second metal electrode. Other embodiments may be described and/or claimed.