Invention Publication
- Patent Title: HYBRID EDGE COUPLERS WITH VOIDS
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Application No.: US17958777Application Date: 2022-10-03
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Publication No.: US20240111096A1Publication Date: 2024-04-04
- Inventor: Yusheng BIAN , Sunoo KIM , Edward W. KIEWRA
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Main IPC: G02B6/122
- IPC: G02B6/122 ; G02B6/13 ; G03F7/00

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to hybrid edge couplers with voids and methods of manufacture. The structure includes: a dielectric material; at least one waveguide structure embedded within the dielectric material; and at least one airgap within the dielectric material and extending along a length of the at least one waveguide structure.
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