- 专利标题: FIELD EFFECT TRANSISTOR WITH BACKSIDE SOURCE/DRAIN
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申请号: US17937967申请日: 2022-10-04
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公开(公告)号: US20240113176A1公开(公告)日: 2024-04-04
- 发明人: Ruilong Xie , Lawrence A. Clevenger , Brent A. Anderson , Kisik Choi , Su Chen Fan , Shogo Mochizuki , SON NGUYEN
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY ARMONK
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY ARMONK
- 主分类号: H01L29/417
- IPC分类号: H01L29/417 ; H01L23/528 ; H01L29/06 ; H01L29/40 ; H01L29/66 ; H01L29/775
摘要:
A semiconductor device includes a field effect transistor (FET). The FET includes a gate and a first source or drain (S/D) region. A frontside S/D contact may be connected to and extend vertically upward from a top surface of the first S/D region. The FET further includes a second S/D region. The second S/D region includes a conduit liner and an inner column internal to the conduit liner that extends below a bottom surface of the wraparound gate. A backside S/D contact may be connected to and extend vertically downward from a bottom surface of the second S/D region.
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