Invention Publication
- Patent Title: APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND METHOD OF USING SAME
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Application No.: US18410370Application Date: 2024-01-11
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Publication No.: US20240141486A1Publication Date: 2024-05-02
- Inventor: Hannu Huotari , Todd Robert Dunn , Michael Eugene Givens , Jereld Lee Winkler , Paul Ma , Eric Shero
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44 ; C23C16/50 ; C23C16/52
Abstract:
Apparatus for mixing two or more gases prior to entering a reaction chamber, reactor systems including the apparatus, and methods of using the apparatus and systems are disclosed. The systems and methods as described herein can be used to, for example, pulse a mixture of two or more precursors to a reaction chamber.
Information query
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