Invention Publication
- Patent Title: SILANE PRECURSORS AND RELATED METHODS
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Application No.: US18381282Application Date: 2023-10-18
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Publication No.: US20240150380A1Publication Date: 2024-05-09
- Inventor: MinSeok Ryu , SangJin Lee , YeRim Yeon , SeongCheol Kim , KieJin Park
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: C07F7/02
- IPC: C07F7/02
Abstract:
Silane precursors and related methods are provided. A method for preparing a silane precursor may comprise one or more of the following steps: contacting a dihalide silane compound and an amine in a first solvent to obtain a first reaction product; and contacting the first reaction product and a reductant in a second solvent to obtain a second reaction product.
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