公开(公告)号：US20230088079A1

公开(公告)日：2023-03-23

申请号：US17860177

申请日：2022-07-08

Applicant: ENTEGRIS, INC.

Inventor： SangJin Lee ,  MinSeok Ryu ,  Sangbum Han ,  SeongCheol Kim ,  YoonHae Kim ,  KieJin Park ,  YeRim Yeon ,  Sungsil Cho ,  HwanSoo Kim ,  JoongKi CHOI

IPC: C07F7/10 ,  H01L21/02 ,  C23C16/455

Abstract: Provided are certain silyl amine compounds useful as precursors in the vapor deposition of silicon-containing materials onto the surfaces of microelectronic devices. Such precursors can be utilized with optional co-reactants to deposit silicon-containing films such as silicon nitride, silicon oxide, silicon oxynitride, silicon oxycarbonitride (SiOCN), silicon carbonitride (SiCN), and silicon carbide.

公开(公告)号：US20240182498A1

公开(公告)日：2024-06-06

申请号：US18513001

申请日：2023-11-17

Applicant: ENTEGRIS, INC.

Inventor： SeongCheol Kim ,  YeRim Yeon ,  SangJin Lee ,  DaHye Kim ,  MinSeok Ryu ,  KieJin Park

IPC: C07F7/10 ,  C23C16/22 ,  C23C16/455

CPC classification number: C07F7/10 ,  C23C16/22 ,  C23C16/45553

Abstract: A composition comprises a disilylamine precursor. The disilylamine precursor comprises a functional group attached to a nitrogen atom of the dilsilylamine precursor. The functional group comprises an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, or a benzyl. Related methods are provided, including a method for forming the disilylamine precursor and a method for vapor deposition.

公开(公告)号：US20240150380A1

公开(公告)日：2024-05-09

申请号：US18381282

申请日：2023-10-18

Applicant: ENTEGRIS, INC.

Inventor： MinSeok Ryu ,  SangJin Lee ,  YeRim Yeon ,  SeongCheol Kim ,  KieJin Park

IPC: C07F7/02

CPC classification number: C07F7/025

Abstract: Silane precursors and related methods are provided. A method for preparing a silane precursor may comprise one or more of the following steps: contacting a dihalide silane compound and an amine in a first solvent to obtain a first reaction product; and contacting the first reaction product and a reductant in a second solvent to obtain a second reaction product.

公开(公告)号：US20230193462A1

公开(公告)日：2023-06-22

申请号：US18082215

申请日：2022-12-15

Applicant: ENTEGRIS, INC.

Inventor： MinSeok Ryu ,  SangJin Lee ,  SeongCheol Kim ,  YeRim Yeon ,  YoonHae Kim ,  KieJin Park

IPC: C23C16/455 ,  C23C16/513

CPC classification number: C23C16/45553 ,  C23C16/513

Abstract: Some embodiments relate to a precursor comprising a precursor for vapor deposition. The precursor comprises an aliphatic hydrocarbon and at least one disilylamine group. The at least one disilylamine group is attached to the aliphatic hydrocarbon. The at least one disilylamine group does not comprise a silanide group. Some embodiments relate to a method for making the precursor. The method comprises reacting a polyamine compound and a silylhalide compound in a presence of a base to form a precursor useful for vapor deposition. Some embodiments relate to a method for forming a silicon-containing film using the precursor.

公开(公告)号：US12071688B2

公开(公告)日：2024-08-27

申请号：US17214701

申请日：2021-03-26

Applicant: ENTEGRIS, INC.

Inventor： SangJin Lee ,  DaHye Kim ,  Sungsil Cho ,  Seobong Chang ,  Jae Eon Park ,  Bryan C. Hendrix ,  Thomas H. Baum ,  SooJin Lee

IPC: C23C16/455 ,  C07F7/02 ,  C07F7/10 ,  C23C16/34 ,  C23C16/40 ,  C23C16/50 ,  H01L21/02

CPC classification number: C23C16/45553 ,  C07F7/025 ,  C07F7/10 ,  C23C16/345 ,  C23C16/402 ,  C23C16/45536 ,  C23C16/50 ,  H01L21/02219 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/02164 ,  H01L21/0217

Abstract: Provided are certain liquid silicon precursors useful for the deposition of silicon-containing films, such as films comprising silicon, silicon nitride, silicon oxynitride, silicon dioxide, silicon carbide, carbon-doped silicon nitride, or carbon-doped silicon oxynitride. Also provided are methods for forming such films utilizing vapor deposition techniques.

公开(公告)号：US20240247010A1

公开(公告)日：2024-07-25

申请号：US18412997

申请日：2024-01-15

Applicant: ENTEGRIS, INC.

Inventor： DaHye Kim ,  YeRim Yeon ,  SangJin Lee ,  MinSeok Ryu ,  SeongCheol Kim

IPC: C07F7/21

CPC classification number: C07F7/21

Abstract: Precursors and related methods are provided. A precursor comprises a cyclosilazane compound. The cyclosilazane compound is a reaction product of an aminosilane and a halosilane. A method for forming the precursor comprises obtaining an aminosilane, obtaining a halosilane, and contacting the aminosilane and the halosilane to obtain the precursor. A method for forming a silicon-containing film using the precursor is also provided, among other embodiments.