Invention Publication
- Patent Title: DEVICE FOR VISUALIZING TEMPERATURE AND AMOUNT OF STATIC ELECTRICITY
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Application No.: US18513655Application Date: 2023-11-20
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Publication No.: US20240167881A1Publication Date: 2024-05-23
- Inventor: Junho OH , Jaehong KIM , Kwangsup KIM , Jongmin LEE , Yeonchul SONG , Youngho PARK , Jihoon YOO , Myeongjun LIM , Sanghyun SON , Joongchol SHIN
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR 20220157508 2022.11.22
- Main IPC: G01J5/08
- IPC: G01J5/08 ; G01R29/12

Abstract:
Provided is a device for visualizing a temperature and an amount of static electricity, wherein the device is arranged adjacent to a substrate processing liquid providing unit including a pipe to provide a passage through which a substrate processing liquid is transferred and a processing liquid storage module for storing the substrate processing liquid, the device including a photographing unit configured to generate a plurality of partially captured images by photographing a plurality of areas of a measurement target, a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target, a thermal imaging camera configured to measure temperatures of the plurality of areas of the measurement target, a processor configured to generate an entire image by combining the plurality of partially captured images with each other, and an output unit configured to output a visualization image.
Information query