公开(公告)号：US20240167881A1

公开(公告)日：2024-05-23

申请号：US18513655

申请日：2023-11-20

Applicant: SEMES CO., LTD.

Inventor： Junho OH ,  Jaehong KIM ,  Kwangsup KIM ,  Jongmin LEE ,  Yeonchul SONG ,  Youngho PARK ,  Jihoon YOO ,  Myeongjun LIM ,  Sanghyun SON ,  Joongchol SHIN

IPC: G01J5/08 ,  G01R29/12

CPC classification number: G01J5/0859 ,  G01R29/12 ,  G01J2005/0077

Abstract: Provided is a device for visualizing a temperature and an amount of static electricity, wherein the device is arranged adjacent to a substrate processing liquid providing unit including a pipe to provide a passage through which a substrate processing liquid is transferred and a processing liquid storage module for storing the substrate processing liquid, the device including a photographing unit configured to generate a plurality of partially captured images by photographing a plurality of areas of a measurement target, a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target, a thermal imaging camera configured to measure temperatures of the plurality of areas of the measurement target, a processor configured to generate an entire image by combining the plurality of partially captured images with each other, and an output unit configured to output a visualization image.