Invention Publication
- Patent Title: SYSTEM ARCHITECTURE, STRUCTURE AND METHOD FOR HYBRID RANDOM ACCESS MEMORY IN A SYSTEM-ON-CHIP
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Application No.: US18420684Application Date: 2024-01-23
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Publication No.: US20240172456A1Publication Date: 2024-05-23
- Inventor: Po-Kai Hsu , Hui-Lin Wang , Ching-Hua Hsu , Yi-Yu Lin , Ju-Chun Fan , Hung-Yueh Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN 2010855208.7 2020.08.24
- The original application number of the division: US17973557 2022.10.26
- Main IPC: H10B63/00
- IPC: H10B63/00 ; H10B61/00 ; H10N50/01 ; H10N50/10 ; H10N50/80 ; H10N70/00 ; H10N70/20

Abstract:
A method of manufacturing a hybrid random access memory in a system-on-chip, including steps of providing a semiconductor substrate with a magnetoresistive random access memory (MRAM) region and a resistive random-access memory (ReRAM) region, forming multiple ReRAM cells in the ReRAM region on the semiconductor substrate, forming a first dielectric layer on the semiconductor substrate, wherein the ReRAM cells are in the first dielectric layer, forming multiple MRAM cells in the MRAM region on the first dielectric layer, and forming a second dielectric layer on the first dielectric layer, wherein the MRAM cells are in the second dielectric layer.
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