Invention Publication
- Patent Title: INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND OPTIMAL SOLUTION SEARCH METHOD
-
Application No.: US18521112Application Date: 2023-11-28
-
Publication No.: US20240177064A1Publication Date: 2024-05-30
- Inventor: Satoshi ITOH , Hitoshi YONEMICHI
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP 22190481 2022.11.29
- Main IPC: G06N20/00
- IPC: G06N20/00 ; G06N5/04

Abstract:
An information processing apparatus includes: a learning trainer configured to train a machine learning model to train a relationship between a process condition and a processing result of a substrate processing apparatus that has executed a processing based on the process condition; an inferrer configured to infer a plurality of processing results depending on a plurality of process conditions using the trained machine learning model; a graph creator configured to plot the plurality of processing results inferred with the machine learning model on a graph with an achievement level for a plurality of target values of the plurality of processing results as a plurality of axes; and an information display configured to display, on the graph, information used by an operator to select an optimal solution for the process condition, based on the plot of the plurality of inferred processing results.
Information query