公开(公告)号：US20230118026A1

公开(公告)日：2023-04-20

申请号：US18085591

申请日：2022-12-21

Applicant: Tokyo Electron Limited

Inventor： Hitoshi YONEMICHI ,  Hisanori SAKAI ,  Takeshi AKIMOTO

IPC: G01N21/95 ,  H01L21/67 ,  G06T11/00 ,  G06T7/00

Abstract: A data processing apparatus comprises processing circuitry configured to generate normalized data by normalizing time series data of multiple wavelengths, measured from a substrate, by using predetermined reference data; divide the normalized data into a plurality of regions for each predetermined time range and predetermined wavelength range; for each respective region of the plurality of regions, extract an outlier value in the respective region as a representative value; and convert the representative values from the plurality of regions into color data to generate image data from the color data.

公开(公告)号：US20240177064A1

公开(公告)日：2024-05-30

申请号：US18521112

申请日：2023-11-28

Applicant: Tokyo Electron Limited

Inventor： Satoshi ITOH ,  Hitoshi YONEMICHI

IPC: G06N20/00 ,  G06N5/04

CPC classification number: G06N20/00 ,  G06N5/04

Abstract: An information processing apparatus includes: a learning trainer configured to train a machine learning model to train a relationship between a process condition and a processing result of a substrate processing apparatus that has executed a processing based on the process condition; an inferrer configured to infer a plurality of processing results depending on a plurality of process conditions using the trained machine learning model; a graph creator configured to plot the plurality of processing results inferred with the machine learning model on a graph with an achievement level for a plurality of target values of the plurality of processing results as a plurality of axes; and an information display configured to display, on the graph, information used by an operator to select an optimal solution for the process condition, based on the plot of the plurality of inferred processing results.

公开(公告)号：US20230138127A1

公开(公告)日：2023-05-04

申请号：US18090537

申请日：2022-12-29

Applicant: Tokyo Electron Limited

Inventor： Hitoshi YONEMICHI

IPC: G06F30/367

Abstract: An information processing method acquires a time series data group measured during a processing cycle for a substrate. The information processing method calculates a statistical value in each cycle of the processing cycle for each of time series data included in the acquired time series data group. The information processing method generates statistical data based on the calculated statistical value. The information processing method divides the generated statistical data or time series data into predetermined sections. The information processing method calculates a representative value for each section based on the divided statistical data or time series data.