Invention Publication
- Patent Title: TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMENSIONAL (1D) PHOTOLITHOGRAPHY MASKS OR HOLOGRAPHIC INTERFERENCE LITHOGRAPHY
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Application No.: US18080431Application Date: 2022-12-13
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Publication No.: US20240192606A1Publication Date: 2024-06-13
- Inventor: Lu Tian , Wei Jin , Joseph Daniel Lowney , Thomas Mercier
- Applicant: GOOGLE LLC
- Applicant Address: US CA Mountain View
- Assignee: GOOGLE LLC
- Current Assignee: GOOGLE LLC
- Current Assignee Address: US CA Mountain View
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/70

Abstract:
Systems and methods are provided for generating a two-dimensional pattern on a photoresist layer. A photoresist layer is exposed via a first exposure to a first unidimensional series of features alternatingly providing first minima and maxima of illumination intensity along a first dimension. The photoresist layer is then exposed via a second exposure to a second unidimensional series of features alternatingly providing second minima and maxima of illumination intensity along a second dimension that is angularly separated from the second dimension by an exposure rotation factor.
Information query
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