• Patent Title: TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMENSIONAL (1D) PHOTOLITHOGRAPHY MASKS OR HOLOGRAPHIC INTERFERENCE LITHOGRAPHY
  • Application No.: US18080431
    Application Date: 2022-12-13
  • Publication No.: US20240192606A1
    Publication Date: 2024-06-13
  • Inventor: Lu TianWei JinJoseph Daniel LowneyThomas Mercier
  • Applicant: GOOGLE LLC
  • Applicant Address: US CA Mountain View
  • Assignee: GOOGLE LLC
  • Current Assignee: GOOGLE LLC
  • Current Assignee Address: US CA Mountain View
  • Main IPC: G03F7/20
  • IPC: G03F7/20 G03F1/70
TWO-DIMENSIONAL (2D) PATTERNS USING MULTIPLE EXPOSURES OF ONE-DIMENSIONAL (1D) PHOTOLITHOGRAPHY MASKS OR HOLOGRAPHIC INTERFERENCE LITHOGRAPHY
Abstract:
Systems and methods are provided for generating a two-dimensional pattern on a photoresist layer. A photoresist layer is exposed via a first exposure to a first unidimensional series of features alternatingly providing first minima and maxima of illumination intensity along a first dimension. The photoresist layer is then exposed via a second exposure to a second unidimensional series of features alternatingly providing second minima and maxima of illumination intensity along a second dimension that is angularly separated from the second dimension by an exposure rotation factor.
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