- 专利标题: MULTI-PITCH PATTERNING THROUGH ONE-STEP FLOW
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申请号: US18064362申请日: 2022-12-12
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公开(公告)号: US20240194672A1公开(公告)日: 2024-06-13
- 发明人: Bharath Bangalore Rajeeva , Manish Chandhok , Gurpreet Singh , Kevin Huggins , Eungnak Han , Florian Gstrein , Marko Radosavljevic
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/02 ; H01L21/027 ; H01L23/522 ; H01L29/10 ; H01L29/423
摘要:
An IC device may include a first conductive structure in a first section and a second conductive structure in a second section. The second conductive structure is in parallel with the first conductive structure in a first direction. A dimension of the second conductive structure in a second direction perpendicular to the first direction is greater than a dimension of the first conductive structure in the second direction. The first conductive structure may be coupled to a channel region of a transistor. The second conductive structure may be coupled to a channel region of another transistor. A first structure comprising a first dielectric material may be over the first conductive structure. A second structure comprising a second dielectric material may be over the second section. A third structure comprising the first dielectric material may be over the second conductive structure and be at least partially surrounded by the second structure.
公开/授权文献
- US3150589A Roller attachment for multilith printing press 公开/授权日:1964-09-29
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