- 专利标题: DIRECT ELECTROPLATING ON MODIFIED POLYMER-GRAPHENE COMPOSITES
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申请号: US18089494申请日: 2022-12-27
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公开(公告)号: US20240213328A1公开(公告)日: 2024-06-27
- 发明人: Vinith BEJUGAM , Yonggang LI , Srinivas V. PIETAMBARAM , Chandrasekharan NAIR , Whitney BRYKS , Gene CORYELL
- 申请人: INTEL CORPORATION
- 申请人地址: US CA SANTA CLARA
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: US CA SANTA CLARA
- 主分类号: H01L29/16
- IPC分类号: H01L29/16 ; H01L21/768 ; H01L23/00 ; H01L23/31 ; H01L23/48
摘要:
Embodiments disclosed herein include a package substrate. In an embodiment, the package substrate comprises a core with a via opening through the core. In an embodiment, the via opening comprises sidewalls. In an embodiment, a composite layer is provided along the sidewalls, and the composite layer comprises carbon. In an embodiment, the package substrate further comprises a via within the via opening, where the via is electrically conductive.
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