Invention Publication
- Patent Title: METHOD FOR PRODUCING ORGANIC SOLVENT SOLUTION OF QUATERNARY AMMONIUM HYDROXIDE
-
Application No.: US18615802Application Date: 2024-03-25
-
Publication No.: US20240228428A1Publication Date: 2024-07-11
- Inventor: Shoji TACHIBANA , Seiji TONO , Sumito ISHIZU , Yoshiaki YAMASHITA
- Applicant: TOKUYAMA CORPORATION
- Applicant Address: JP Shunan-shi
- Assignee: TOKUYAMA CORPORATION
- Current Assignee: TOKUYAMA CORPORATION
- Current Assignee Address: JP Shunan-shi
- Priority: JP 18183274 2018.09.28 JP 19009734 2019.01.23 JP 19035854 2019.02.28
- The original application number of the division: US17280328 2021.03.26
- Main IPC: C07C211/63
- IPC: C07C211/63

Abstract:
A treatment liquid composition for semiconductor production including: a quaternary ammonium hydroxide; and a first organic solvent dissolving the quaternary ammonium hydroxide, the first organic solvent being a water-soluble organic solvent having a plurality of hydroxy groups, wherein a water content in the composition is no more than 1.0 mass % on the basis of the total mass of the composition; contents of Na, Mg, Al, K, Ca, Ti, Cr, Mn, Fe, Ni, Cu, and Zn in the composition are each no more than 100 mass ppb on the basis of the total mass of the composition; and a content of Cl in the composition is no more than 100 mass ppb on the basis of the total mass of the composition.
Information query