公开(公告)号：US20220033343A1

公开(公告)日：2022-02-03

申请号：US17280328

申请日：2019-09-26

Applicant: TOKUYAMA CORPORATION

Inventor： Shoji TACHIBANA ,  Seiji TONO ,  Sumito ISHIZU ,  Yoshiaki YAMASHITA

IPC: C07C211/63

Abstract: A treatment liquid composition for semiconductor production including: a quaternary ammonium hydroxide; and a first organic solvent dissolving the quaternary ammonium hydroxide, the first organic solvent being a water-soluble organic solvent having a plurality of hydroxy groups, wherein a water content in the composition is no more than 1.0 mass % on the basis of the total mass of the composition; contents of Na, Mg, Al, K, Ca, Ti, Cr, Mn, Fe, Ni, Cu, and Zn in the composition are each no more than 100 mass ppb on the basis of the total mass of the composition; and a content of Cl in the composition is no more than 100 mass ppb on the basis of the total mass of the composition.

公开(公告)号：US20240228428A1

公开(公告)日：2024-07-11

申请号：US18615802

申请日：2024-03-25

Applicant: TOKUYAMA CORPORATION

Inventor： Shoji TACHIBANA ,  Seiji TONO ,  Sumito ISHIZU ,  Yoshiaki YAMASHITA

IPC: C07C211/63

CPC classification number: C07C211/63

Abstract: A treatment liquid composition for semiconductor production including: a quaternary ammonium hydroxide; and a first organic solvent dissolving the quaternary ammonium hydroxide, the first organic solvent being a water-soluble organic solvent having a plurality of hydroxy groups, wherein a water content in the composition is no more than 1.0 mass % on the basis of the total mass of the composition; contents of Na, Mg, Al, K, Ca, Ti, Cr, Mn, Fe, Ni, Cu, and Zn in the composition are each no more than 100 mass ppb on the basis of the total mass of the composition; and a content of Cl in the composition is no more than 100 mass ppb on the basis of the total mass of the composition.

公开(公告)号：US20200330946A1

公开(公告)日：2020-10-22

申请号：US16305297

申请日：2018-01-16

Applicant: TOKUYAMA CORPORATION

Inventor： Yasuyuki SAKAGAMI ,  Takuya MAJIMA ,  Yoshiaki YAMASHITA

IPC: B01J8/34 ,  B01J8/18 ,  C01B33/107

Abstract: To provide (i) a new internal member capable of accelerating reaction between a gas and a solid, (ii) a fluidized-bed reactor in which such an internal member is placed, and (iii) a method for producing trichlorosilane with use of such a fluidized-bed reactor, an internal member in accordance with an embodiment of the present invention is an internal member for use in a fluidized-bed reactor, the internal member including at least one resistive element having an upper surface having a conical or pyramid-shaped portion.