Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
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Application No.: US18439898Application Date: 2024-02-13
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Publication No.: US20240276721A1Publication Date: 2024-08-15
- Inventor: Kohei DATE , Kenji AOYAMA , Keisuke SUDA , Minami TANAKA , Satoshi NAGASHIMA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP 23020952 2023.02.14
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/10

Abstract:
According to one embodiment, a semiconductor memory device includes a plurality of conductor layers including a first conductor layer as an uppermost layer; a plurality of memory pillars penetrating the conductor layers; and a member that includes a first portion extending in the conductor layers and a plurality of second portions RT provided apart from each other on the uppermost layer side of the conductor layers, and divides the conductor layers in a direction in a substrate surface; wherein a lower surface of the second portion is located below an upper surface of the first conductor layer, and an upper surface of the second portion is wider in a width in the direction, than the lower surface of the second portion and than the first portion.
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