- 专利标题： METHOD FOR PREPARING AN ALUMINUM DOPED SILICON CARBIDE CRYSTAL BY PROVIDING A COMPOUND INCLUDING ALUMINUM AND OXYGEN IN A CAPSULE COMPRISED OF A FIRST AND SECOND MATERIAL
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申请号： US18655053申请日： 2024-05-03
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公开(公告)号： US20240287705A1公开(公告)日： 2024-08-29
- 发明人: Ilya Zwieback , Varatharajan Rengarajan , Andrew E. Souzis , Gary E. Ruland
- 申请人： II-VI ADVANCED MATERIALS, LLC
- 申请人地址： US NJ Pine Brook
- 专利权人： II-VI ADVANCED MATERIALS, LLC
- 当前专利权人： II-VI ADVANCED MATERIALS, LLC
- 当前专利权人地址： US NJ Pine Brook
- 主分类号： C30B23/02
- IPC分类号： C30B23/02 ; C01B32/956 ; C04B35/573 ; C04B35/65 ; C30B29/36 ; G02F1/00 ; H01L29/36
摘要：
The present disclosure generally relates to a physical vapor transport system including a chamber, a growth crucible positioned within the chamber, the growth crucible sealable with a growth crucible lid, and a doping capsule positioned within the growth crucible. The doping capsule includes an outer crucible fitted with an outer crucible lid, an inner crucible fitted with an inner crucible lid, the inner crucible fitted with the inner crucible lid positioned within the outer crucible, and a capillary channel formed by a first aperture in the outer crucible lid and a second aperture in the inner crucible lid.
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