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公开(公告)号:US20240287705A1
公开(公告)日:2024-08-29
申请号:US18655053
申请日:2024-05-03
IPC分类号: C30B23/02 , C01B32/956 , C04B35/573 , C04B35/65 , C30B29/36 , G02F1/00 , H01L29/36
CPC分类号: C30B23/02 , C01B32/956 , C04B35/573 , C04B35/65 , C30B29/36 , C04B2235/3205 , C04B2235/3826 , C04B2235/3839 , C04B2235/425 , C04B2235/722 , C04B2235/76 , C04B2235/9661 , G02F1/0063 , H01L29/36
摘要: The present disclosure generally relates to a physical vapor transport system including a chamber, a growth crucible positioned within the chamber, the growth crucible sealable with a growth crucible lid, and a doping capsule positioned within the growth crucible. The doping capsule includes an outer crucible fitted with an outer crucible lid, an inner crucible fitted with an inner crucible lid, the inner crucible fitted with the inner crucible lid positioned within the outer crucible, and a capillary channel formed by a first aperture in the outer crucible lid and a second aperture in the inner crucible lid.