Invention Publication
- Patent Title: MACHINE LEARNING MODEL FOR SEMICONDUCTOR MANUFACTURING PROCESSES
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Application No.: US18191697Application Date: 2023-03-28
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Publication No.: US20240332092A1Publication Date: 2024-10-03
- Inventor: Zhiqiang HUANG , Li Ming TAN , Joanna Kejun LOH , Olivia Fatma KOENTJORO , Roger Alan LINDLEY
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G05B13/02 ; G05B13/04

Abstract:
The disclosure describes methods and systems for training and deploying a machine learning predictive model for use in a semiconductor manufacturing process. Specifically, the present disclosure provides for training machine learning predictive models for manufacturing components using design data, process parameters, gas flow configurations from a pixelated showerhead, temperature profile across an electrostatic chuck, and measured uniformity profiles of processed wafers. The present disclosure also provides for deploying the machine learning predictive model to effectuate real-time adjustments to a manufacturing process.
Information query
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