Invention Application
- Patent Title: THREE-DIMENSIONAL (3D) DUAL COMPLEMENTARY CIRCUIT STRUCTURES AND RELATED FABRICATION METHODS
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Application No.: US18314245Application Date: 2023-05-09
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Publication No.: US20240379679A1Publication Date: 2024-11-14
- Inventor: Xia Li , Junjing Bao , Jun Yuan
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/822 ; H01L21/8238 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/775

Abstract:
A 3D dual complementary-circuit structure includes a first forksheet structure stacked on a first side of, in a first direction, a second forksheet structure to provide two complementary circuits in a space of a single forksheet structure. A dividing wall bisects at least one semiconductor slab in the first forksheet structure into a first slab portion with a first semiconductor type and a second slab portion with a second semiconductor type and also bisects at least one semiconductor slab in the second forksheet structure into a third slab portion with a third semiconductor type and a fourth slab portion with a fourth semiconductor type. One of the second semiconductor type, the third semiconductor type, and the fourth semiconductor type may be a same semiconductor type as the first semiconductor type. Two complementary metal oxide semiconductor (CMOS) circuits may be formed in the area of a single forksheet structure.
Information query
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