Invention Application
- Patent Title: MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
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Application No.: US18663961Application Date: 2024-05-14
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Publication No.: US20240391757A1Publication Date: 2024-11-28
- Inventor: Marco GARBARINO , Gabriele GATTERE
- Applicant: STMicroelectronics International N.V.
- Applicant Address: CH Geneva
- Assignee: STMicroelectronics International N.V.
- Current Assignee: STMicroelectronics International N.V.
- Current Assignee Address: CH Geneva
- Priority: IT102023000010326 20230522
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/125

Abstract:
A microelectromechanical accelerometer includes a microstructure, having sensing terminals and driving terminals distinct from the sensing terminals, a supporting body and a movable mass, coupled to the supporting body so as to be able to oscillate according to a sensing axis with respect to a rest position, and a control unit coupled to the microstructure so as to form a force feedback loop configured to maintain the movable mass in the rest position. The movable mass includes a sensing structure and a driving structure, respectively coupled to the sensing terminals and to the driving terminals through capacitive couplings variable as a function of displacements of the movable mass from the rest position. The sensing structure and the driving structure are electrically insulated and rigidly coupled with each other.
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