公开(公告)号：US20240391757A1

公开(公告)日：2024-11-28

申请号：US18663961

申请日：2024-05-14

Applicant: STMicroelectronics International N.V.

Inventor： Marco GARBARINO ,  Gabriele GATTERE

IPC: B81B3/00 ,  G01P15/125

Abstract: A microelectromechanical accelerometer includes a microstructure, having sensing terminals and driving terminals distinct from the sensing terminals, a supporting body and a movable mass, coupled to the supporting body so as to be able to oscillate according to a sensing axis with respect to a rest position, and a control unit coupled to the microstructure so as to form a force feedback loop configured to maintain the movable mass in the rest position. The movable mass includes a sensing structure and a driving structure, respectively coupled to the sensing terminals and to the driving terminals through capacitive couplings variable as a function of displacements of the movable mass from the rest position. The sensing structure and the driving structure are electrically insulated and rigidly coupled with each other.

公开(公告)号：US20240426868A1

公开(公告)日：2024-12-26

申请号：US18738990

申请日：2024-06-10

Applicant: STMicroelectronics International N.V.

Inventor： Francesco RIZZINI ,  Gabriele GATTERE

IPC: G01P15/125 ,  G01P21/00

Abstract: A MEMS sensor comprising a semiconductor body and a mass elastically coupled to the semiconductor body for oscillating with respect to the semiconductor body in a oscillation direction in response to a force acting on the mass in the oscillation direction, the force being caused by an acceleration applied to the MEMS sensor. The mass and the semiconductor body define at least one measurement structure with parallel-plate electrodes, which is configured to measure capacitively a position of the mass that is indicative of the acceleration applied to the MEMS sensor. The mass and the semiconductor body further define a calibration structure with comb-finger electrodes that is electrically controllable, in a calibration mode of the MEMS sensor, to bring about electrostatically a displacement of the mass with respect to the semiconductor body in the oscillation direction.

公开(公告)号：US20240377198A1

公开(公告)日：2024-11-14

申请号：US18654869

申请日：2024-05-03

Applicant: STMicroelectronics International N.V.

Inventor： Gabriele GATTERE ,  Luca GUERINONI

IPC: G01C19/5762 ,  G01C19/5726

Abstract: Test method of a vibrational MEMS structure wherein, a direct, variable modification voltage is applied to a resonance modification test structure having non-rectilinear electrodes, modifying the resonance frequency of the movable mass and the driving frequency. During the test, the movable mass is verified about stability and, if not stable, the vibrational MEMS structure is rejected.