公开(公告)号：US20240391757A1

公开(公告)日：2024-11-28

申请号：US18663961

申请日：2024-05-14

Applicant: STMicroelectronics International N.V.

Inventor： Marco GARBARINO ,  Gabriele GATTERE

IPC: B81B3/00 ,  G01P15/125

Abstract: A microelectromechanical accelerometer includes a microstructure, having sensing terminals and driving terminals distinct from the sensing terminals, a supporting body and a movable mass, coupled to the supporting body so as to be able to oscillate according to a sensing axis with respect to a rest position, and a control unit coupled to the microstructure so as to form a force feedback loop configured to maintain the movable mass in the rest position. The movable mass includes a sensing structure and a driving structure, respectively coupled to the sensing terminals and to the driving terminals through capacitive couplings variable as a function of displacements of the movable mass from the rest position. The sensing structure and the driving structure are electrically insulated and rigidly coupled with each other.