Invention Application
- Patent Title: Symmetric Coupling of Coil to Direct-Drive Radiofrequency Power Supplies
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Application No.: US18689030Application Date: 2022-09-14
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Publication No.: US20240395503A1Publication Date: 2024-11-28
- Inventor: John Drewery , Alexander Miller Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2022/043464 WO 20220914
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A coil is disposed next to a plasma processing chamber. A first direct-drive radiofrequency (RF) power supply has an output through which a first shaped-amplified square waveform signal is transmitted. A first reactive circuit is connected between the output of the first direct-drive RF power supply and a first end of the coil. The first reactive circuit transforms the first shaped-amplified square waveform signal into a first shaped-sinusoidal signal in route to the first end of the coil. A second direct-drive RF power supply has an output through which a second shaped-amplified square waveform signal is transmitted. A second reactive circuit is connected between the output of the second direct-drive RF power supply and a second end of the coil. The second reactive circuit transforms the second shaped-amplified square waveform signal into a second shaped-sinusoidal signal in route to the second end of the coil.
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