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公开(公告)号：US20240332943A1
公开(公告)日：2024-10-03
申请号：US18740501
申请日：2024-06-11
发明人： John Pease , John Drewery
CPC分类号： H02H1/0023 , H02H3/046 , H02H3/202
摘要： A voltage transient detector includes circuitry for transmitting electrical current through a light emitting diode and a fuse that is serially connected between the light emitting diode and a reference potential, such that the light emitting diode is illuminated when the fuse is not blown. The voltage transient detector also includes circuitry for transmitting a controlled amount of electrical current through the fuse in conjunction with an occurrence of a voltage transient at a voltage measurement location, where the voltage transient exceeds a set transient threshold voltage. The controlled amount of electrical current transmitted through the fuse causing the fuse to blow and the light emitting diode to turn off, thereby indicating occurrence of the voltage transient at the voltage measurement location.
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公开(公告)号：US11692732B2
公开(公告)日：2023-07-04
申请号：US16909949
申请日：2020-06-23
CPC分类号： F24F13/00 , H01J37/321 , H01J37/32522 , H01J37/32651 , H01J37/32963
摘要： A chamber is provided. The chamber includes a Faraday shield positioned above a substrate support of the chamber. A dielectric window is disposed over the Faraday shield, and the dielectric window has a center opening. A hub having an internal plenum for passing a flow of fluid received from an input conduit and removing the flow of fluid from an output conduit is further provided. The hub has sidewalls and a center cavity inside of the sidewalls for an optical probe, and the internal plenum is disposed in the sidewalls. The hub has an interface surface that is in physical contact with a back side of the Faraday shield. The physical contact provides for a thermal couple to the Faraday shield at a center region around said center opening, and an outer surface of the sidewalls of the hub are disposed within the center opening of the dielectric window.
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公开(公告)号：US10784083B2
公开(公告)日：2020-09-22
申请号：US16162769
申请日：2018-10-17
发明人： Maolin Long , John Drewery , Alex Paterson
摘要： A voltage sensor for a substrate processing system is provided. The voltage sensor includes a terminal, a first channel, and a second channel. The terminal connects to a pickup device of a substrate support in the substrate processing system. The first channel is configured to detect, at the pickup device, first radio frequency voltages in a first voltage range. The first channel includes a first voltage divider. The first voltage divider is connected to the terminal and is configured to output a first reduced voltage representative of a detected one of the first radio frequency voltages. The second channel is configured to detect, at the pickup device, second radio frequency voltages in a second voltage range. The second channel includes a second voltage divider. The second voltage divider is connected to the terminal and is configured to output a second reduced voltage representative of a detected one of the second radio frequency voltages. The second voltage range is different than the first voltage range.
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公开(公告)号：US20180156489A1
公开(公告)日：2018-06-07
申请号：US15885728
申请日：2018-01-31
CPC分类号： F24F13/00 , H01J37/321 , H01J37/32522 , H01J37/32651 , H01J37/32963
摘要： A chamber is provided. The chamber includes a Faraday shield positioned above a substrate support of the chamber. A dielectric window is disposed over the Faraday shield, and the dielectric window has a center opening. A hub having an internal plenum for passing a flow of fluid received from an input conduit and removing the flow of fluid from an output conduit is further provided. The hub has sidewalls and a center cavity inside of the sidewalls for an optical probe, and the internal plenum is disposed in the sidewalls. The hub has an interface surface that is in physical contact with a back side of the Faraday shield. The physical contact provides for a thermal couple to the Faraday shield at a center region around said center opening, and an outer surface of the sidewalls of the hub are disposed within the center opening of the dielectric window.
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公开(公告)号：US09824896B2
公开(公告)日：2017-11-21
申请号：US14932458
申请日：2015-11-04
发明人： Zhongkui Tan , Qian Fu , Ying Wu , Qing Xu , John Drewery
IPC分类号： H01L21/3065 , H01L21/311 , H01L21/308 , H01J37/32 , H01L21/3213 , H01L21/67
CPC分类号： H01L21/3065 , H01J37/32082 , H01J37/32146 , H01J37/32165 , H01J37/32174 , H01J37/3244 , H01J37/32715 , H01J2237/334 , H01L21/30655 , H01L21/308 , H01L21/31116 , H01L21/31122 , H01L21/31138 , H01L21/31144 , H01L21/32136 , H01L21/67069
摘要： A substrate is disposed on a substrate holder within a process module. The substrate includes a mask material overlying a target material with at least one portion of the target material exposed through an opening in the mask material. A plasma is generated in exposure to the substrate. For a first duration, a bias voltage is applied at the substrate holder at a first bias voltage setting corresponding to a high bias voltage level. For a second duration, after completion of the first duration, a bias voltage is applied at the substrate holder at a second bias voltage setting corresponding to a low bias voltage level. The second bias voltage setting is greater than 0 V. The first and second durations are repeated in an alternating and successive manner for an overall period of time necessary to remove a required amount of the target material exposed on the substrate.
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公开(公告)号：US20170031370A1
公开(公告)日：2017-02-02
申请号：US14832824
申请日：2015-08-21
发明人： John Drewery
IPC分类号： G05D7/06
CPC分类号： H01L21/00 , G05D7/0641 , H01L21/67 , Y10T137/87249
摘要： A gas delivery system delivers different process gas compositions to a common supply line at specified times. Multiple reservoirs are fluidly connected to the common supply line with each reservoir having its own charge control valve for controlling connection of the reservoir to the common supply line. Each of the multiple reservoirs has a corresponding mass flow controller and delivery control valve connected to control flow of process gas from within the reservoir to a process module at specified times. The common supply line is operated to fill the multiple reservoirs with different process gas compositions in a time-divided manner. The mass flow controllers and delivery control valves of the multiple reservoirs are operated to deliver one or more process gas compositions to the process module in an accurately timed manner in accordance with a prescribed schedule. The multiple reservoirs are filled as needed to satisfy the prescribed schedule.
摘要翻译： 气体输送系统在特定时间将不同的工艺气体组成递送到公共供应管线。 多个储存器流体连接到公共供应管线，每个储存器具有其自己的充电控制阀，用于控制储存器与公共供应管线的连接。 多个储存器中的每一个具有相应的质量流量控制器和输送控制阀，其连接以在规定时间内控制从储存器内的处理气体到处理模块的流动。 操作公共供应管线以分时方式填充具有不同工艺气体组成的多个储存器。 操作多个储存器的质量流量控制器和输送控制阀，以按照规定的时间表精确地定时地将一个或多个处理气体组合物输送到过程模块。 根据需要填充多个水库以满足规定的时间表。
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公开(公告)号：US12040605B2
公开(公告)日：2024-07-16
申请号：US18011188
申请日：2021-09-29
发明人： John Pease , John Drewery
CPC分类号： H02H1/0023 , H02H3/046 , H02H3/202
摘要： A voltage transient detector includes circuitry for transmitting electrical current through a light emitting diode and a fuse that is serially connected between the light emitting diode and a reference potential, such that the light emitting diode is illuminated when the fuse is not blown. The voltage transient detector also includes circuitry for transmitting a controlled amount of electrical current through the fuse in conjunction with an occurrence of a voltage transient at a voltage measurement location, where the voltage transient exceeds a set transient threshold voltage. The controlled amount of electrical current transmitted through the fuse causing the fuse to blow and the light emitting diode to turn off, thereby indicating occurrence of the voltage transient at the voltage measurement location.
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公开(公告)号：US20220216038A1
公开(公告)日：2022-07-07
申请号：US17605982
申请日：2020-04-24
发明人： Ying Wu , Maolin Long , John Drewery , Vikram Singh
IPC分类号： H01J37/32
摘要： Systems and methods for multi-level pulsing are described. The systems and methods include generating four or more states. During each of the four or more states, a radio frequency (RF) generator generates an RF signal. The RF signal has four or more power levels, and each of the four or more power levels corresponds to the four or more states. The multi-level pulsing facilitates a finer control in processing a substrate.
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公开(公告)号：US10950454B2
公开(公告)日：2021-03-16
申请号：US15669871
申请日：2017-08-04
发明人： Xiang Zhou , Tom A. Kamp , Yoshie Kimura , Duming Zhang , Chen Xu , John Drewery , Alex Paterson
IPC分类号： H01L21/3065 , H01L21/67 , H01J37/32
摘要： A method for etching a substrate includes performing, in a plasma chamber, a first etch of a substrate material using a plasma etch process. The first etch forms features to a first depth in the material. Following the first etch, the method includes performing, in the plasma chamber without removing the substrate from the chamber, an atomic layer passivation (ALP) process to deposit a conformal film of passivation over the mask and the features formed during the first etch. The ALP process uses a vapor from a liquid precursor to form passivation over the features and the mask. The method further includes performing, in the plasma chamber, a second etch of the material using the plasma etch process. The conformal film of passivation is configured to protect the mask and sidewalls of the features during the second etch. A plasma processing system also is described.
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公开(公告)号：US20200318852A1
公开(公告)日：2020-10-08
申请号：US16909949
申请日：2020-06-23
摘要： A chamber is provided. The chamber includes a Faraday shield positioned above a substrate support of the chamber. A dielectric window is disposed over the Faraday shield, and the dielectric window has a center opening. A hub having an internal plenum for passing a flow of fluid received from an input conduit and removing the flow of fluid from an output conduit is further provided. The hub has sidewalls and a center cavity inside of the sidewalls for an optical probe, and the internal plenum is disposed in the sidewalls. The hub has an interface surface that is in physical contact with a back side of the Faraday shield. The physical contact provides for a thermal couple to the Faraday shield at a center region around said center opening, and an outer surface of the sidewalls of the hub are disposed within the center opening of the dielectric window.
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