Invention Application
- Patent Title: METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL
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Application No.: US18676023Application Date: 2024-05-28
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Publication No.: US20240401194A1Publication Date: 2024-12-05
- Inventor: Shuaidi Zhang , Mustafa Muhammad , Moataz Bellah Mousa , Paul Ma , Jonathan Bakke , Todd Robert Dunn , Eric James Shero , Jereld Lee Winkler , YoungChol Byun , Shubham Garg , Jacqueline Wrench
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C16/455 ; C23C16/52 ; H01L21/67

Abstract:
The current disclosure relates to example method, system and apparatus for coupling a delivery vessel disposed at a first location on a substrate processing platform to a remote refill vessel disposed in a second location remote from the substrate processing platform via a first chemical delivery line, storing a chemical in the remote refill vessel in a first phase, changing the chemical in the remote refill vessel to a second phase, transporting the chemical in the second phase, to the delivery vessel via the first chemical delivery line, heating the first chemical delivery line to a first temperature equal to or above a phase change temperature of the chemical, and coupling the delivery vessel to an accumulator via a second chemical delivery line.
Information query
IPC分类: