Invention Application
- Patent Title: Mobile Cart for Commissioning Semiconductor Processing Tool
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Application No.: US18239783Application Date: 2023-08-30
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Publication No.: US20240404848A1Publication Date: 2024-12-05
- Inventor: Sam KIM , Kon Tae PARK , Yao-Hung YANG , Michael John PERRY , Michael LEVKOVITCH , Ram Chandra PALSANIYA , Nitin KHURANA , Derek MCQUARRIE
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H02J7/00
Abstract:
Methods and apparatus for commissioning a semiconductor processing tool include connecting a mobile facilities cart to a semiconductor processing tool; supplying facilities from the mobile facilities cart to the semiconductor processing tool; and operating the semiconductor processing tool using facilities supplied by the connected mobile facilities cart.
Information query
IPC分类:
