MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
Abstract:
A magnetoresistive random access memory device includes a bottom electrode, a spin orbit torque (SOT) layer, a magnetic tunneling junction (MTJ) and a top electrode. The bottom electrode includes a first layer and a second layer connected with the first layer. A material of the first layer includes Tax1Ny1, a material of the second layer includes Tax2Ny2, and the following relationships are satisfied: y2/x2>1, y1/x1≥1, and y2/x2>y1/x1. The SOT layer is disposed on the bottom electrode. The MTJ is disposed on the SOT layer. The top electrode is disposed on the MTJ.
Information query
Patent Agency Ranking
0/0