Invention Application
- Patent Title: SEMICONDUCTOR WAFER HANDLING APPARATUS AND SEMICONDUCTOR WAFER TESTING SYSTEM
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Application No.: US18816814Application Date: 2024-08-27
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Publication No.: US20250076366A1Publication Date: 2025-03-06
- Inventor: Aritomo Kikuchi , Toshiyuki Kiyokawa
- Applicant: ADVANTEST Corporation
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST Corporation
- Current Assignee: ADVANTEST Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2023-141564 20230831
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/073

Abstract:
A semiconductor wafer handling apparatus that moves a semiconductor wafer including a device under test (DUT) and presses a terminal of the DUT against a contactor of a probe card, the semiconductor wafer handling apparatus includes an optical probe that inputs and outputs an optical signal to and from an optical connection part of the DUT. The terminal is disposed on a first surface of the semiconductor wafer. The optical connection part is disposed on a second surface of the semiconductor wafer.
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