Invention Application
- Patent Title: Control System For Adaptive Control Of A Thermal Processing System
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Application No.: US18959024Application Date: 2024-11-25
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Publication No.: US20250093852A1Publication Date: 2025-03-20
- Inventor: Michael X. Yang , Markus Lieberer , Joseph Cibere
- Applicant: Beijing E-Town Semiconductor Technology Co., Ltd. , Mattson Technology, Inc.
- Applicant Address: CN Beijing; US CA Fremont
- Assignee: Beijing E-Town Semiconductor Technology Co., Ltd.,Mattson Technology, Inc.
- Current Assignee: Beijing E-Town Semiconductor Technology Co., Ltd.,Mattson Technology, Inc.
- Current Assignee Address: CN Beijing; US CA Fremont
- Main IPC: G05B19/4155
- IPC: G05B19/4155 ; H01L21/67

Abstract:
A control system operable to train a control tuner to generate temperature setpoint tracking improvements for a thermal processing system is provided. In one example implementation, temperature setpoint tracking improvements are achieved by generating system controller parameter adjustments based on a difference between a simulated workpiece temperature estimate and an actual workpiece temperature estimate. For example, a system model can generate a simulated workpiece temperature estimate simulating an actual workpiece temperature estimate, and based on the difference between the simulated and actual workpiece temperature estimates, generate clone controller parameter adjustments. The clone controller parameter adjustments can be used to generate system controller parameter adjustments, which can improve temperature setpoint tracking for the thermal processing system.
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