Invention Grant
- Patent Title: Apparatus for cutting a drawing in a layer of synthetic material
- Patent Title (中): 用于切割合成材料层的图纸
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Application No.: US3555950DApplication Date: 1969-06-09
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Publication No.: US3555950APublication Date: 1971-01-19
- Inventor: GIJSBERS THOMAS GERARDUS , LEBLANS LEOPOLD MICHAEL LAMBER , DANIELS HENRICUS PETRUS CORNEL
- Applicant: PHILIPS CORP
- Assignee: Philips Corp
- Current Assignee: Philips Corp
- Priority: NL6808110 1968-06-08
- Main IPC: B05C17/06
- IPC: B05C17/06 ; B26F3/08 ; B43L13/00 ; G03F1/00 ; H01L21/027 ; B26D7/10
Abstract:
In manufacturing patterns such as photomasks, contours are cut in a foil by means of a cutting tool, after which the material of the foil situated inside or outside the contours is removed. According to the invention, a cutter is used which is preferably rotationally symmetrical, the cutting part of which extends at right angles to the plane of the foil and is heated during cutting of the foil to facilitate the cutting operation. Any contours may be cut by means of this tool which is insensitive to the direction of cutting.
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