公开(公告)号：US3555950A

公开(公告)日：1971-01-19

申请号：US3555950D

申请日：1969-06-09

Applicant: PHILIPS CORP

Inventor： GIJSBERS THOMAS GERARDUS ,  LEBLANS LEOPOLD MICHAEL LAMBER ,  DANIELS HENRICUS PETRUS CORNEL

IPC: B05C17/06 ,  B26F3/08 ,  B43L13/00 ,  G03F1/00 ,  H01L21/027 ,  B26D7/10

CPC classification number: G03F1/68 ,  B05C17/06 ,  B26F3/08 ,  B43L13/001 ,  Y10S83/929 ,  Y10S83/956 ,  Y10T83/0348 ,  Y10T83/293

Abstract: In manufacturing patterns such as photomasks, contours are cut in a foil by means of a cutting tool, after which the material of the foil situated inside or outside the contours is removed. According to the invention, a cutter is used which is preferably rotationally symmetrical, the cutting part of which extends at right angles to the plane of the foil and is heated during cutting of the foil to facilitate the cutting operation. Any contours may be cut by means of this tool which is insensitive to the direction of cutting.