Invention Grant
US3609356A Feedback controlled scanning microscopy apparatus for x-ray diffraction topography
失效
用于X射线衍射图的反馈控制扫描显微镜装置
- Patent Title: Feedback controlled scanning microscopy apparatus for x-ray diffraction topography
- Patent Title (中): 用于X射线衍射图的反馈控制扫描显微镜装置
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Application No.: US3609356DApplication Date: 1968-12-16
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Publication No.: US3609356APublication Date: 1971-09-28
- Inventor: SCHWUTTKE GUENTHER H , MELLAERT LEO J VAN
- Applicant: IBM
- Assignee: Ibm
- Current Assignee: Ibm
- Priority: US78405268 1968-12-16
- Main IPC: G01N23/205
- IPC: G01N23/205 ; G01N23/207 ; G01N23/20
Abstract:
Disclosed is apparatus for forming topographs of large crystalline areas using X-ray diffraction microscopy techniques. The apparatus includes an X-ray source which directs an X-ray beam at a crystal which is mounted on a position control unit. The position control unit includes a scanning goniometer for translating the crystal and a low friction device for rotating the crystal both with respect to the incident X-ray beam. A beam detector is positioned to detect a diffracted beam as it leaves the crystal. The X-ray detector is connected to the position control unit through a feedback control unit. The feedback control unit operates by introducing a small input perturbation signal into the position control unit thereby causing the crystal to rotate back and forth and causing the diffracted X-ray beam to have an X-ray component which results from the input perturbation signal. The feedback control unit operates to monitor the intensity of the diffracted X-ray beam and the perturbation component thereof so as to adjust automatically the angular position of the position control unit toward an angle (the Bragg angle) which causes the X-ray detector to detect a maximum intensity.
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