Invention Grant
US3609356A Feedback controlled scanning microscopy apparatus for x-ray diffraction topography 失效
用于X射线衍射图的反馈控制扫描显微镜装置

  • Patent Title: Feedback controlled scanning microscopy apparatus for x-ray diffraction topography
  • Patent Title (中): 用于X射线衍射图的反馈控制扫描显微镜装置
  • Application No.: US3609356D
    Application Date: 1968-12-16
  • Publication No.: US3609356A
    Publication Date: 1971-09-28
  • Inventor: SCHWUTTKE GUENTHER HMELLAERT LEO J VAN
  • Applicant: IBM
  • Assignee: Ibm
  • Current Assignee: Ibm
  • Priority: US78405268 1968-12-16
  • Main IPC: G01N23/205
  • IPC: G01N23/205 G01N23/207 G01N23/20
Feedback controlled scanning microscopy apparatus for x-ray diffraction topography
Abstract:
Disclosed is apparatus for forming topographs of large crystalline areas using X-ray diffraction microscopy techniques. The apparatus includes an X-ray source which directs an X-ray beam at a crystal which is mounted on a position control unit. The position control unit includes a scanning goniometer for translating the crystal and a low friction device for rotating the crystal both with respect to the incident X-ray beam. A beam detector is positioned to detect a diffracted beam as it leaves the crystal. The X-ray detector is connected to the position control unit through a feedback control unit. The feedback control unit operates by introducing a small input perturbation signal into the position control unit thereby causing the crystal to rotate back and forth and causing the diffracted X-ray beam to have an X-ray component which results from the input perturbation signal. The feedback control unit operates to monitor the intensity of the diffracted X-ray beam and the perturbation component thereof so as to adjust automatically the angular position of the position control unit toward an angle (the Bragg angle) which causes the X-ray detector to detect a maximum intensity.
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