发明授权
US3630684A Device for heater movement in crucible-free zone melting a crystalline rod 失效
用于加热器运动的装置在可自由区域熔化一个晶体管

  • 专利标题: Device for heater movement in crucible-free zone melting a crystalline rod
  • 专利标题(中): 用于加热器运动的装置在可自由区域熔化一个晶体管
  • 申请号: US3630684D
    申请日: 1967-09-22
  • 公开(公告)号: US3630684A
    公开(公告)日: 1971-12-28
  • 发明人: KELLER WOLFGANG
  • 申请人: SIEMENS AG
  • 专利权人: Siemens Ag
  • 当前专利权人: Siemens Ag
  • 优先权: DES0106086 1966-09-24
  • 主分类号: C30B13/32
  • IPC分类号: C30B13/32 H01L21/208 B01J17/10
Device for heater movement in crucible-free zone melting a crystalline rod
摘要:
Device for crucible-free zone melting a crystalline rod includes a zone-melting chamber having a sidewall formed with a substantially vertical slot, heating means extending through said slot into said chamber and energizable for forming a melting zone in a substantially vertically supported crystalline rod mounted in said chamber, slide means located adjacent said sidewall and carrying said heating means, said slide means and said heating means being slidable together relative to the rod in the direction of the rod axis whereby the melting zone is passed through the rod, and an elastically deformable sealing strip mounted between said slide means and said sidewall of said zone melting chamber and completely surrounding said slot whereby said slot is gastightly sealed, said sealing strip being secured against displacement.
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