Invention Grant
- Patent Title: Technique for the preparation of iron oxide films by cathodic sputtering
- Patent Title (中): 通过阴极溅射制备氧化铁膜的技术
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Application No.: US3669863DApplication Date: 1970-12-28
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Publication No.: US3669863APublication Date: 1972-06-13
- Inventor: PETERS FRANK GROOM , SINCLAIR WILLIAM ROBERT , SULLIVAN VINCENT
- Applicant: BELL TELEPHONE LABOR INC
- Assignee: Nokia Bell Labs
- Current Assignee: Nokia Bell Labs
- Priority: US10147870 1970-12-28
- Main IPC: C23C14/00
- IPC: C23C14/00 ; G03F1/54 ; C23C15/00
Abstract:
A technique for the preparation of iron oxide films designed for use as photomasks for thin film and semiconductor processing involves sputtering iron in a carbon monoxide ambient containing carbon dioxide upon a substrate member.
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