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公开(公告)号：US3669863A
公开(公告)日：1972-06-13
申请号：US3669863D
申请日：1970-12-28
Applicant: BELL TELEPHONE LABOR INC
Inventor： PETERS FRANK GROOM , SINCLAIR WILLIAM ROBERT , SULLIVAN VINCENT
CPC classification number: G03F1/54 , C23C14/0057
Abstract: A technique for the preparation of iron oxide films designed for use as photomasks for thin film and semiconductor processing involves sputtering iron in a carbon monoxide ambient containing carbon dioxide upon a substrate member.
Abstract translation: 用于制备用作薄膜和半导体处理的光掩模的氧化铁膜的技术包括在含有二氧化碳的一氧化碳环境中将铁溅射到基底部件上。
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公开(公告)号：US3924093A
公开(公告)日：1975-12-02
申请号：US35873073
申请日：1973-05-09
Applicant: BELL TELEPHONE LABOR INC
CPC classification number: G03F1/54 , G03C1/705 , H01L21/0275 , Y10S430/146
Abstract: Supported photomasks useful in the fabrication of printed circuitry are produced by laser machining of amorphous iron oxide film blanks. Resolution improvement relative to that obtained by use of other film materials is ascribed to crystallization of film regions bordering those which are volatilized.
Abstract translation: 用于制造印刷电路的支持的光掩模是通过激光加工无定形氧化铁薄膜坯料制成的。 与通过使用其它膜材料获得的分辨率提高相关的归因于与挥发的膜区域相邻的膜区域的结晶。
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公开(公告)号：US3650921A
公开(公告)日：1972-03-21
申请号：US3650921D
申请日：1970-06-15
Applicant: BELL TELEPHONE LABOR INC
Inventor： PETERS FRANK GROOM , SINCLAIR WILLIAM ROBERT , SULLIVAN MILES VINCENT
Abstract: A TECHNIQUE FOR THE PREPARATION IRON OXIDE FILMS DESTINED FOR USE AS PHOTOMASKS FOR THIN FILM AND SEMICONDUCTOR PROCESSING INVOLVES SPUTTERING IRON OXIDE IN A CARBON DIOXIDE AMBIENT UPON AN ELECTRICALLY ISOLATED SUBSTRATE MEMBER.
Abstract translation: 1346814溅射氧化铁WESTERN ELECTRIC CO公司1971年6月9日[1970年6月15日] 19691/71标题C7F [也在G2部分]光掩模是通过阴极溅射基底上的一层氧化铁在包含至少3％ 体积二氧化碳，然后蚀刻。 优选将亚铁或三氧化铁（例如，3480A厚的Fe 2 O 3膜）溅射到冷却的玻璃基板上，在3-100％CO 2的气氛中任选与稀有气体混合，使用10 - 1 至10
-3 Torr，使用1-5kV的DC偏置RF电位和至少0-1兆兆频率。
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