An apparatus for a floating zone melt processing of a semiconductor rod including a heating circuit comprised of an annular induction heating coil adapted to annularly encompass a zone of the semiconductor rod and upon activation to produce an annular melt zone on such rod, a plurality of ceramic capacitors positioned within a fluid-impermeable housing filled with a low viscosity dielectric cooling fluid, such as a transformer oil, and connected in parallel with the heating coil and hollow electric current conduits coupling the heating coil and the capacitors to the output circuit of a high frequency generator and to a hydraulic heat-exchange circuit.