发明授权
US4040083A Aluminum oxide layer bonding polymer resin layer to semiconductor device
失效
氧化铝层结合聚合物树脂层到半导体器件
- 专利标题: Aluminum oxide layer bonding polymer resin layer to semiconductor device
- 专利标题(中): 氧化铝层结合聚合物树脂层到半导体器件
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申请号: US526407申请日: 1974-11-22
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公开(公告)号: US4040083A公开(公告)日: 1977-08-02
- 发明人: Atsushi Saiki , Seiki Harada , Yoichi Oba
- 申请人: Atsushi Saiki , Seiki Harada , Yoichi Oba
- 申请人地址: JA
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JA
- 优先权: JA49-41011 19740415
- 主分类号: H01L21/283
- IPC分类号: H01L21/283 ; H01L21/312 ; H01L23/29 ; H01L23/31 ; H01L23/485 ; H01L23/30 ; H01L23/50
摘要:
Disclosed is a semiconductor device including a Si body, and SiO.sub.2 layer disposed on the surface of the body, an aluminum oxide layer having a thickness of about 50 A on the SiO.sub.2 layer, which is formed by applying a solution including an aluminum chelate compound onto the SiO.sub.2 layer and heating the solution at a temperature of 300.degree. C. for 30 minutes, and a polymer resin layer of polyimide disposed on the aluminum oxide layer. In this device, the adhesive-strength between the SiO.sub.2 layer and the polyimide layer is remarkably increased when compared with a semiconductor device wherein the polyimide layer is directly disposed on the SiO.sub.2 layer.
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