发明授权
- 专利标题： Method for aligning laser beam with fuses in integrated circuit
- 专利标题（中）： 激光束与集成电路中的熔丝对准的方法
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申请号： US257505申请日： 1981-04-21
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公开(公告)号： US4383165A公开(公告)日： 1983-05-10
- 发明人: Ronald J. Smith , John P. Dishaw
- 申请人： Ronald J. Smith , John P. Dishaw
- 申请人地址： CA Santa Clara
- 专利权人： Intel Corporation
- 当前专利权人： Intel Corporation
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01L21/822
- IPC分类号： H01L21/822 ; B23K26/02 ; H01L21/268 ; H01L21/768 ; H01L21/82 ; H01L23/525 ; H01L23/544 ; H01L27/04 ; B23K26/00 ; B23K26/04
摘要：
A method is disclosed for aligning a laser beam to an integrated circuit. A pair of generally parallel spaced-apart fusible links are formed on the circuit. The laser beam is positioned to a site known to be to one side of one link. Then the beam is stepped towards the links until the link is blown. The beam is then moved a predetermined distance so that it is positioned to one side of the other link. This beam is then stepped toward this link in the opposite direction until it is blown. The midpoint between the links can then be readily computed.
公开/授权文献
- US5515950A Disc brake friction pad assembly 公开/授权日：1996-05-14
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