发明授权
- 专利标题: Positive-working radiation-sensitive mixture
- 专利标题(中): 正面工作的辐射敏感混合物
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申请号: US551025申请日: 1983-11-14
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公开(公告)号: US4506003A公开(公告)日: 1985-03-19
- 发明人: Hans Ruckert , Gerhard Buhr , Hartmut Steppan
- 申请人: Hans Ruckert , Gerhard Buhr , Hartmut Steppan
- 申请人地址: DEX Frankfurt am Main
- 专利权人: Hoechst Aktiengesellschaft
- 当前专利权人: Hoechst Aktiengesellschaft
- 当前专利权人地址: DEX Frankfurt am Main
- 优先权: DEX3023201 19800621
- 主分类号: G03C1/72
- IPC分类号: G03C1/72 ; C08L33/00 ; C08L33/02 ; C08L61/00 ; C08L61/04 ; C08L61/06 ; C08L75/00 ; C08L75/04 ; G03C1/74 ; G03C5/00 ; G03F7/004 ; G03F7/039 ; G03F7/16 ; H01L21/027 ; H01L21/30 ; H05K3/00 ; G03C1/68
摘要:
A positive-working radiation-sensitive mixture is described which is composed of a compound having at least one C--O--C bond which can be split by acid, a compound which forms a strong acid when irradiated, a binder which is insoluble in water and soluble in aqueous-alkaline solutions, and a resin having solubility properties which differ from those of the binder and which is selected from (1) a polyurethane resin obtained from an organic isocyanate and a polymer which contains hydroxyl groups, (2) a polyvinyl alkyl ether, (3) an alkyl acrylate polymer, or (4) a hydrogenated or partially hydrogenated derivative of colophony. As a result of the resin additives, photoresist layers are obtained which have good adhesion to the support, good flexibility, good latitude in developing and good resolution.
公开/授权文献
- US5687550A Blow molding sealed container system 公开/授权日:1997-11-18
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