发明授权
- 专利标题: Liquid metal ion source and apparatus
- 专利标题(中): 液态金属离子源及仪器
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申请号: US674771申请日: 1984-11-26
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公开(公告)号: US4624833A公开(公告)日: 1986-11-25
- 发明人: Kaoru Umemura , Tohru Ishitani , Toshiyuki Aida , Hifumi Tamura
- 申请人: Kaoru Umemura , Tohru Ishitani , Toshiyuki Aida , Hifumi Tamura
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX58-222033 19831128
- 主分类号: C22C19/03
- IPC分类号: C22C19/03 ; H01J1/02 ; H01J27/26 ; H01J37/08 ; H01J1/05
摘要:
A liquid metal ion source for emitting P ions, wherein a Cu alloy which contains at most 25 at. % of P and if necessary, further contains Ag, C or Si, and/or B is melted and fed to an emitter tip so as to generate an ion beam under a high electric field.
公开/授权文献
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