发明授权
US4629899A Deflection lens system for generating a beam of neutral particles of
variable cross section
失效
用于产生可变横截面的中性粒子束的偏转透镜系统
- 专利标题： Deflection lens system for generating a beam of neutral particles of variable cross section
- 专利标题（中）： 用于产生可变横截面的中性粒子束的偏转透镜系统
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申请号： US817167申请日： 1986-01-08
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公开(公告)号： US4629899A公开(公告)日： 1986-12-16
- 发明人: Erich Plies
- 申请人： Erich Plies
- 申请人地址： DEX Berlin and Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DEX Berlin and Munich
- 优先权： DEX3235068 19820922
- 主分类号： G21K1/08
- IPC分类号： G21K1/08 ; G21K1/093 ; G21K5/04 ; H01J37/141 ; H01J37/30 ; H01L21/027 ; H05H7/00 ; H05H3/00
摘要：
An apparatus for deflecting and focusing a beam of neutral particles for operating on extremely small workpieces, such as for doping or inscribing micro-electronic components, has a deflection system for generating at least one magnetic field through which the beam of neutral particles is directed for focusing and shaping of the beam on the workpiece. The lens system may include one or more six-pole or eight-pole lenses.