发明授权
- 专利标题: Piezoelectric flow control valve
- 专利标题(中): 压电流量控制阀
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申请号: US925251申请日: 1986-10-31
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公开(公告)号: US4728074A公开(公告)日: 1988-03-01
- 发明人: Toshihiko Igashira , Yasuyuki Sakakibara , Kazuhide Watanabe , Nobuyuki Murate
- 申请人: Toshihiko Igashira , Yasuyuki Sakakibara , Kazuhide Watanabe , Nobuyuki Murate
- 申请人地址: JPX Nishio
- 专利权人: Nippon Soken, Inc.
- 当前专利权人: Nippon Soken, Inc.
- 当前专利权人地址: JPX Nishio
- 优先权: JPX60-245313 19851102
- 主分类号: F02M51/06
- IPC分类号: F02M51/06 ; F02D41/20 ; F02D41/24 ; F02D41/40 ; F02M45/06 ; F02M47/02 ; F02M51/04 ; F02M63/00 ; F02M63/04 ; F16K21/12 ; H02N2/02
摘要:
A piezoelectric flow control valve comprising a slidable closure member (22) for controlling a flow of fluid through a fluid passage (42) between a fluid inlet (40) and a fluid outlet (32). The closure member (22) is biased toward a normally closed position by a plunger (70) responsive to a hydraulic pressure in a pressure chamber (78) which is in fluid communication with the fluid inlet (40) through a restriction and with a pumping chamber (96) of a piezoelectric pump (72). In order to prevent fluid leakage under situations wherein the fluid pressure at the fluid inlet (40) is not high enough to ensure closure of the member (22), the present invention provides spring biased pressure mechanism (106) for biasing the closure member (22) toward the normally closed position and override means (130) for overriding the pressure mechanism (106) in response to a predetermined pressure at the fluid inlet (40).
公开/授权文献
- US5800611A Method for making large area single crystal silicon sheets 公开/授权日:1998-09-01