发明授权
- 专利标题: Spectrometer objective for electron beam mensuration techniques
- 专利标题(中): 电子束测量技术的光谱仪物镜
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申请号: US874498申请日: 1986-06-16
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公开(公告)号: US4808821A公开(公告)日: 1989-02-28
- 发明人: Hans-Peter Feuerbaum , Juergen Frosien
- 申请人: Hans-Peter Feuerbaum , Juergen Frosien
- 申请人地址: DEX Berlin and Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin and Munich
- 优先权: DEX3521464 19850614
- 主分类号: H01J37/28
- IPC分类号: H01J37/28 ; G01Q20/02 ; G01Q20/04 ; G01Q30/02 ; G01R31/28 ; G01R31/305 ; H01J37/10 ; H01J37/147 ; H01J37/244 ; H01J37/26 ; H01J49/06 ; H01J49/44 ; H01J49/48 ; H01J37/05
摘要:
A spectrometer objective is composed of a short focal length, asymmetrical objective lens comprising an integrated electrostatic opposing field spectrometer and a single-stage deflection system arranged within the magnetic lens. Since the deflection of primary electrons occurs within the spectrometer objective, the space for a two-state deflection system employed in conventional systems between a condenser lens and an objective lens can be eliminated. The extremely-short structural length of the electron beam measuring apparatus which is thereby obtainable, in turn, has a beneficial effect on the influence of the lateral Boersch effect on probe diameter, this influence increasing with the length of the electron-optical beam path.
公开/授权文献
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