发明授权
- 专利标题: Fabrication of polydiacetylene waveguides
- 专利标题(中): 聚二乙炔波导的制造
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申请号: US176647申请日: 1988-04-01
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公开(公告)号: US4824522A公开(公告)日: 1989-04-25
- 发明人: Gregory L. Baker , Cynthia F. Klausner
- 申请人: Gregory L. Baker , Cynthia F. Klausner
- 申请人地址: NJ Livingston
- 专利权人: Bell Communications Research, Inc.
- 当前专利权人: Bell Communications Research, Inc.
- 当前专利权人地址: NJ Livingston
- 主分类号: G02B6/13
- IPC分类号: G02B6/13 ; B44C1/22 ; B29C37/00 ; C03C15/00 ; C03C25/06
摘要:
Novel optical waveguides and methods for their fabrication are provided. The waveguides are made from polydiacetylene materials. The waveguides are made by a bilayer process wherein a film made from a soluble polydiacetylene material is applied to a substrate and a silicon-containing imaging layer is applied atop the polyacetylene layer. Thereafter a pattern is produced in the imaging layer, for example, by photolithographic methods, and the pattern is transferred to the underlying polydiacetylene layer by exposure to an oxygen plasma. Polydiacetylene waveguides greater than 0.4 microns thickness are thereby produced.
公开/授权文献
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