Fabrication of polydiacetylene waveguides
    2.
    发明授权
    Fabrication of polydiacetylene waveguides 失效
    聚二乙炔波导的制造

    公开(公告)号:US4824522A

    公开(公告)日:1989-04-25

    申请号:US176647

    申请日:1988-04-01

    CPC分类号: G02B6/13

    摘要: Novel optical waveguides and methods for their fabrication are provided. The waveguides are made from polydiacetylene materials. The waveguides are made by a bilayer process wherein a film made from a soluble polydiacetylene material is applied to a substrate and a silicon-containing imaging layer is applied atop the polyacetylene layer. Thereafter a pattern is produced in the imaging layer, for example, by photolithographic methods, and the pattern is transferred to the underlying polydiacetylene layer by exposure to an oxygen plasma. Polydiacetylene waveguides greater than 0.4 microns thickness are thereby produced.

    摘要翻译: 提供了新的光波导及其制造方法。 波导由聚二乙炔材料制成。 波导通过双层工艺制成,其中将由可溶性聚二乙炔材料制成的膜施加到基底上,并且将含硅成像层施加在聚乙炔层顶上。 此后,例如通过光刻法在成像层中产生图案,并且通过暴露于氧等离子体将图案转移到下面的聚二乙炔层。 由此产生大于0.4微米厚度的聚二乙炔波导。