Invention Grant
US4851364A Method of forming well regions for field effect transistors utilizing self-aligned techniques 失效
使用自对准技术形成场效应晶体管的区域的方法

Method of forming well regions for field effect transistors utilizing
self-aligned techniques
Abstract:
The present invention deals with a semiconductor memory circuit device, in which a memory array portion of a rectangular shape consisting of semiconductor non-volatile memory elements is formed on a main surface of the semiconductor substrate, a low voltage driver circuit (decoder) is formed along a side of the memory array portion, and a high voltage driver circuit is formed along an opposite side of the memory array portion. This permits a reduction in word line length and avoids crossing of the word lines to permit increased operation speed and, particularly, increased reading speed.
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