发明授权
- 专利标题: Photo ion spectrometer
- 专利标题(中): 光离子光谱仪
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申请号: US14332申请日: 1987-02-13
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公开(公告)号: US4889987A公开(公告)日: 1989-12-26
- 发明人: Dieter M. Gruen , Charles E. Young , Michael J. Pellin
- 申请人: Dieter M. Gruen , Charles E. Young , Michael J. Pellin
- 申请人地址: IL Chicago
- 专利权人: ARCH Development Corporation
- 当前专利权人: ARCH Development Corporation
- 当前专利权人地址: IL Chicago
- 主分类号: H01J49/02
- IPC分类号: H01J49/02 ; H01J49/06 ; H01J49/14 ; H01J49/16 ; H01J49/28
摘要:
A charged particle spectrometer for performing ultrasensitive quantitative analysis of selected atomic components removed from a sample. Significant improvements in performing energy and angular refocusing spectroscopy are accomplished by means of a two dimensional structure for generating predetermined electromagnetic field boundary conditions. Both resonance and non-resonance ionization of selected neutral atomic components allow accumulation of increased chemical information. A multiplexed operation between a SIMS mode and a neutral atomic component ionization mode with EARTOF analysis enables comparison of chemical information from secondary ions and neutral atomic components removed from the sample. An electronic system is described for switching high level signals, such as SIMS signals, directly to a transient recorder and through a charge amplifier to the transient recorder for a low level signal pulse counting mode, such as for a neutral atomic component ionization mode.
公开/授权文献
- US5397078A Apparatus for aligning and securing pallets in an aircraft 公开/授权日:1995-03-14
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