发明授权
- 专利标题: EPROM with increased floating gate/control gate coupling
- 专利标题(中): EPROM具有增加的浮栅/控制栅耦合
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申请号: US336265申请日: 1989-04-11
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公开(公告)号: US4892840A公开(公告)日: 1990-01-09
- 发明人: Agerico L. Esquivel , Robert Groover, III , Howard L. Tigelaar
- 申请人: Agerico L. Esquivel , Robert Groover, III , Howard L. Tigelaar
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/762 ; H01L21/8247 ; H01L27/115
摘要:
Disclosed is a floating gate memory array having high-speed programming capabilities. Diffused buried bit lines (14) are formed spaced apart in a semiconductor, forming conduction channels therebetween. Dielectric-filled trenches (24) are formed between the bit lines (14). An insulated floating gate conductor (18) and an insulated control gate conductor (23) are formed over the wafer and patterned to extend over the dielectric-filled trenches (24). The enhanced coupling efficiency between the control gate (23) and the floating gate (18) enhances the programmability of the memory cells.
公开/授权文献
- US5454637A Space master cabinet system 公开/授权日:1995-10-03
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